Complex solution for MEMS parameters control

Microelecrtomechanical systems (MEMS) are not very big devices which are joined with semiconductor devices and which combine characteristics of circuits and mechanical components. 

Different types of MEMS demand parameters control in terms of various physical, temperature effects and other conditions that define functionality of equipment. Usually to achieve reliable and accurate equipment inspection there are required careful choice, design and each subsystem component’s integration including measuring equipment, device for mechanical effect, testing adaptor, equipment for temperature modes alignment and software as well.

Using its own development Measuring complex for functional control FT-17 as test equipment, Sovtest ATE, Ltd develops and supplies ready-made MEMS testing solutions both for short-series manufacturing (semi-automated) and full-automated systems for inspection of large production.

Solution for short-series manufacturing.

Semi-automated (minimum operator’s participating) solution for short-series manufacturing includes:
  • measuring equipment (in this case it is measuring complex for functional control FT-17);
  • testing adaptor with contact devices for installation of one or more tested objects;
  • equipment for alignment physical effects on tested object.
Testing adaptor is installed on the equipment for alignment physical effects and with the help of cable set is connected with measuring system. All the system components are connected by one program environment which task is to control test process, to align conditions, to measure output signals, to collect statistics, etc.

The equipment for alignment of physical effects can be both stands for imitation of a single effect and complicated multi-component stands as well.

Solution examples.

I.  Testing of accelerometers MEMS parameters

Used to control accelerometers MEMS parameters at manufacturing and input control.

Parameters under control:
  • MEMS transformation coefficient;
  • transformation coefficient instability in terms of temperature changing;
  • linearity of transformation coefficient;
  • MEMS current consumption;
  • zero offset value and instability zero offset;
  • MEMS dynamical characteristics (pass band).
The system construction:
  1. Calibrating vibration table TV 51140-C (Tira)
  2. Portable research system TP04300A (Temptronic)
  3. Measuring complex for functional control FT-17
Main characteristics:
  • max preset speed-up – up to 68 g;
  • range of preset frequency by vibrating system – between 40 Hz and 25 kHz;
  • max. expulsive force – 400 N;
  • range of temperatures set up by term system – between - 80°C and +225°C
  • temperature changing speed - from 55°С to +125°С  - 5 sec.
  • voltage supply on MEMS under tests – от 30 V, 5 А
  • scan of input characteristics of tested MEMS – by means of oscillograph with pass band 70 MHz;
  • simultaneous measurements – max. 64 channels.
Metrological support.

It is included in State register measuring equipment (certificate for measuring equipment of military purposes type confirmation).

II.Testing of gyroscope and angle transmitter MEMS parameters. 

The equipment is used to control MEMS parameters of gyroscopes, angle transmitters, tilt sensors and angular speed at manufacturing and input control. It can be used for calibrating MEMS accelerometers.

Parameters under control:
  • MEMS transformation coefficient;
  • transformation coefficient instability in terms of temperature changing;;
  • linearity of transformation coefficient;
  • MEMS current consumption;
  • zero offset value and instability zero offset;
  • MEMS dynamical characteristics (pass band).
System construction:
  1. Double-axis stand for alignment of physical effects 
  2. Temperature chamber
  3. Measuring complex for functional control FT-17
Main characteristics:
  • range of preset angular speed – ±1500 °/c (for internal axle);
  • range of preset angle – ±360 ° (for internal axle), 0…90 ° (for external axle);
  • accuracy of preset angular values – ±0,0005 °;
  • range of temperatures set up by term system – between - 60°C and +125°C
  • temperature measuring speed - 4 °/sec.
  • voltage supply on MEMS under tests – min. 30 V, 5 А
  • scan of input characteristics of tested MEMS – by means of oscillograph with pass band 70 MHz;
  • simultaneous measurements – max. 64 channels.
Metrological support.

It is included in State register measuring equipment (certificate for measuring equipment of military purposes type confirmation).

Related products
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Testing system FT-17DT is a desktop type of FT-17HF tester (the previous Sovtest ATE specialists’ development in quality control of microelectronic products). The equipment construction has got ergonomical design which makes it the best solution for consumers who are concerned in certificated microchips tests and who use input control of components small sets at their facilities. As for technical abilities new model FT-17 HF is equal to the previous one, the only difference is in maximum number of pin-electronic modules (FT-17DT has got 4 modules and 256 measuring channels; FT-17HF has got 12 modules and 786 measuring channels). But the main advatntage of FT-17DT system is that this product is absolutely Russian development: from electronics to body frame.  

The tester software XperTest is the result of Sovtest ATE specialists’ work as well and it supports Russian language. 

Areas of application:
  • Output control of microelectronic components and systems parameters (in body frame and on semiconductor plate) in production and lab terms.
  • Input control of microelectronic components and systems parameters at ECB consumer facilities.
  • Scientific work, control of microelectronic components boundary parameters and systems, certificated tests.
Objects under control and measure: 
  • Digital IS of random logic (PLD, microprocessors, microcontrollers, IS of standard logic, etc.)
  • Memory devices (RAM, RAM of different types)
  • Digital-to-analog IS (AD converters, DA converters, on-chip systems)
  • RFID (RF tags, smart cards) 

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Sovtest ATE burn-in complexes are made for widespread use in terms of both series production at the stage of product manufacturing and during input control at companies who use microelectronics devices and at companies who perform certificated components’ tests. The bur-in complex can be used when failure-free testing (OST 11 073.013 method 700-1, 700-2.1) and influence testing of high-temperature working environment (OST 11 073.013 method 204). The complex is a module construction and can be easily modified according to customer’s requirements to test performance.

The basis of the complex’s construction is consists of multipurpose warmth chamber with cassettes guides inside. The chamber’s working capacity provides performing burn-in test of microchips set (maximum 16 cassettes in one space, maximum 60 microchips per cassette) with temperature range between +50°С and +160°С. The chamber is supplied with alarm of testing mode increase. Accuracy of temperature control in the chamber working space is ±2°С. The warmth chamber is guided and programmed by external controller.

On customer request complex’s construction can be modified by means of using another type of warmth chamber with less (or more) working capacity.

For voltage supplying on the tested workpiece there included fixed and regulated power sources with the current charge control possibility. For assignment of burn-in electrical modes there apply dynamic input/output modules of development and manufacturing by Sovtest ATE, Ltd.

In case of necessity of additional monitoring and measuring opportunities, the set of standard instruments can be completed with off-brand modules and devices which support PXI, GPIB. For such cases there is support of these standards from complexes side.

Included SDIO6420 dynamic digital modules allow to perform testing at maximum frequency 20 MHz. Each SDIO6420 module consists of 64 bidirectional input/output channels with driver maximum charge capacity 80 mA.

Components under burn-in tests are fixed on cassettes. According to the information given by Sovtest ATE about functional purpose of connector pins fixed in the chamber customer can develop and manufacture cassettes for its own needs. 

Software supplied with the complex has got such functions as:
  • management of complex’s components work;
  • management of burn-in process (assignment of the modes, contact time, limits and other)
  • management of process of electrical modes supplement (management programs and drivers for all the assignment and measurement modules)
  • management of data gathering about burn-in process and statistic storage management;
  • set of standard programs for burn-in testing of most common components (discrete components, memory microchips)
  • set-up environment for development of own programs according to certain customer’s tasks.

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Sovtest ATE, Ltd. presents its new development multifunctional relay tester FT-17R which is used for measurement parameters of direct and alternating current electromagnet relay for suitability to technical and GOST 16121-86 requirements. The relay tester is 19” stand with operator’s working place. 

This equipment has got wide area of application. It can be used for control output products at electromagnet relay manufacturing facilities, for input control of relay parameters at consumer production and for control of relay parameters at certificate centers and “second supplier” as well. With the help of this development diagnosis of failure and relay parameters inspections can be held including influence of environment (vibration, shock, climate and other). Relay tester FT-17R is unique with its multifunctionality. Its abilities allow to achieve 6 controlled relay coil and 8 controlled relay contact groups with increasing possibility both of them. In basic configuration there is one working place but it is possible to enlarge number of simultaneous tested relays up to 4 pcs.

With the help of the relay tester FT-17R it is possible to carry out measurements of all the relay characteristics:
  • voltage and drop-off/pick-up current measurement,
  • contacts’ resistance and relay coil measurement (4 wire measurement),
  • isolation resistance measurement,
  • timing parameters measurement (pick-up time, drop-off time, overshoot time, time of transitional bounce process)
  • detection of three-point condition and false pick-up (during vibration resistance tests).
Due to latest technologies this tester shortens inspection time which now takes no more than 3 seconds per a relay with 2 contact sets. The equipment can operate in two modes: research mode (“expanded mode”) and presorting mode («valid or faulty»).

The multifunctional relay tester FT-17R provides simultaneous connection of maximum 6 terminal, closing or transfer contacts. It also provides time parameters control in single response and commutation modes.

Parameters under control:
  • pick-up time is a time interval from the moment of voltage supply on binding to the first contact closure (or contact breaking if relay has only  terminal contacts);
  • drop-off time is a time interval from the moment of removal voltage from binding to the first contact closure (or contact breaking if relay has only  terminal contacts);
  • bounce time at pick-up and drop-off is a time interval from the moment of the first contact closing to the beginning of the last closing, and from the moment of the first breaking to the last contact breaking;
  • overshoot time  at pick-up and drop-off is a time interval from the moment of the first breaking of closing contact to the first closing of terminal contact;
  • time difference (for relays with more than 1set for switching) is a time interval from the moment of the first  closing of any terminal contacts to breaking the last of the terminal contacts at pick-up and drop-off.
When measuring pick-up time, drop-off time, overshoot time and time difference there doesn’t count bounce time.

For relay inspection contact devices made for required types of body frame are used.

Along with the relay tester FT-17R the software is supplied to the customer for carrying out testing process and developing own testing programs for relay inspection by tester’s operator. Additionally there is provided software and equipment set for performing self-diagnostic and metrological calibration tests. Also there are statistics information processing and output.

The multifunctional relay tester FT-17R is included in State register of measuring equipment in Russian Federation, № 48854-12.

Relay tester FT-17R